MEMS Component Manufacturing

Microelectromechanical Systems (MEMS)

EDM Department’s precision micro-manufacturing processes off our customers unique micro fabrication capabilities for micro-electro-mechanical-systems (MEMS) applications. With many MEMS components being extremely small, even microscopic, utilization of micro-manufacturing techniques that allow aspect ratios of 38:1, features sizes as small as 40um, Wire EDM machining using wire diameters of 20um, state-of-the-art equipment and experienced engineers, EDM Department Inc. manufactures the most intricate parts with flawless accuracy.

Using high-resolution 3D scanning technologies, we offer verification of various dimensions of features within MEMS components, automated comparisons of high-resolution 3D part scans against the original CAD model and high-resolution profile and area-based roughness measurement of surfaces down to 1.2 µinches. Our 3D inspection technology is capable of measuring the surface roughness of almost any material, including metals, ceramics, and plastics.Semiconductor Wafer

Typical MEMS projects that take advantage of the micro-manufacturing capabilites offered by EDM Department Inc. include prototype and production MEMS components, tooling for the production and testing of MEMS assemblies and non-contact 3D metrology of new and exisiting MEMS components.